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Origin & Historical Standards for Clean Room
In 1961, Sandia in the United States invented laminar flow clean room for the first time, which resulted in clean environment unknown before, and enormously helped Space Project Apollo in America. Later, clean room technology was gradually adopted by high-tech industry, with which industrial participants and regulators found it’s necessary for establishing specifications and standards regarding clean room. Finally, USA Federal Standard No. 209 (Clean Room Standards) was established in 1963, which classified cleanliness into three levels, namely, Class 100, Class 10,000 and Class 100,000, and specified test method of cleanliness, way of air flow, pressure, temperature and humidity with regard to clean room. Then, the standards were successively revised in 1966, 1973, 1987, 1988 and 1992, corresponding to editions 209A, 209B, 209C, 209D and 209E, respectively.
Table 1-1 Key Points of FS-209D Standards
|
Class |
Particle |
Differential pressure |
Temperature |
RH |
air velocity |
Lumin |
|
|
Grain size |
Count |
InAq (mmAq) |
F (℃) |
RH % |
FPM |
Foot-candle, fc (Lux) |
|
|
1 |
≥0.5 |
≤1 |
≥0.05 |
No specially assigned
72℉ |
No specially assigned 40±5
|
Laminar flow |
100 |
|
10 |
≥0.5 |
≤10 |
|||||
|
100 |
≥0.5 |
≤100 |
|||||
|
1,000 |
≥0.5 |
≤1,000 |
|||||
|
10,000 |
≥0.5 |
≤10,000 |
|||||
|
≥5 |
≤65 |
||||||
|
100,000 |
≥0.5 |
≤100,000 |
|||||
|
≥5 |
≤700 |
||||||
Note: 1 fc=10.76Lux
Table 1-2 Key Points of NASA’s Clean Room Standards (NHB-5340·2)
|
Cleanliness Class of biological clean room (BCR) |
Particle |
Microbe |
||
|
Grain size |
Cumulative count of particles |
Count of airborne microbe |
Count of settling microbe |
|
|
100 |
≥0.5 |
≤100(≤3.5) |
≤0.1(0.0035) |
1,200(12,900) |
|
10,000 |
≥0.5 |
≤10,000(≤350) |
≤0.1(0.0176) |
6,000(64,600) |
|
≥5.0 |
≤65(≤2.3) |
|||
|
100,000 |
≥0.5 |
≤100,000 |
≤2.5(0.0884) |
30,000(323,000) |
|
≥5.0 |
≤700(≤25) |
|||
Table 1-3 Cleanliness class under FS-209E (1992)