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Q:Is the efficiency different for HEPA used in clean rooms of different cleanliness classs?

Q:Is the efficiency different for HEPA used in clean rooms of different cleanliness classs?

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A: Applicable efficiency of strainers for use in clean rooms of various cleanliness classs is listed in Table 5-11. However, consideration should be given to the suitability of air change frequency.

Table 5-11 Recommended efficiency of strainers


Cleanliness class of clean room

HEPA strainer

Intermediary strainer

Primary strainer

class10 ~ class 1

0.1μm,
≥DOP 99.9995%

≥NBS  90%

≥AFI  90%

class 1000 ~ class 100

0.3μm
≥DOP 97%

≥NBS  80%

≥AFI  80%

class 10,000

0.3μm
≥DOP 95%

≥NBS  70%

≥AFI  70%

class 100,000

0.3μm
≥DOP 90%

≥NBS  70%

≥AFI  60%