A: Applicable efficiency of strainers for use in clean rooms of various cleanliness classs is listed in Table 5-11. However, consideration should be given to the suitability of air change frequency.
Table 5-11 Recommended efficiency of strainers
Cleanliness class of clean room | HEPA strainer | Intermediary strainer | Primary strainer |
class10 ~ class 1 | 0.1μm, | ≥NBS 90% | ≥AFI 90% |
class 1000 ~ class 100 | 0.3μm | ≥NBS 80% | ≥AFI 80% |
class 10,000 | 0.3μm | ≥NBS 70% | ≥AFI 70% |
class 100,000 | 0.3μm | ≥NBS 70% | ≥AFI 60% |